Capillary Tube Thermal Mass Flow Meters & Controllers - A User's Guide

This paper describes capillary tube mass flow meters and controllers for use in general purpose industrial and laboratory applications and in the fabrication of semiconductor devices. It provides a detailed description of the major components---flow body, flow conditioner, bypass, capillary sensor tube, control valve, and electronics. Flow ranges and specifications for which this technology is best suited are presented. The paper explains the principle of operation; describes gas conversion factors that provide multi-gas capability in a single instrument; lists best practices for users, including the selection, installation, and operation of the instruments; and concludes with a discussion of preferred methods of flow calibration.

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